16
ISSN 0236-3933. Вестник МГТУ им. Н.Э. Баумана. Сер. «Приборостроение». 2012
5. Y o u n g w o r t h R. N., G a l l a g h e r B. B., S t a m p e r B. L. An overview of
power spectral density (PSD) calculations // Proc. SPIE. – 2005. – 5869,
58690U.
6. S i d i c k E. Power Spectral Density Specification and Analysis of Large Opti-
cal Surfaces // Proc. of SPIE. – 2009. – Vol. 7390. – Р. 73900L-1.
7. L a w s o n J. K., W o l f e C. R., M a n e s K. R. et al. Specification of optical
components using the power spectral density function // Proc. SPIE. – 1995. –
P. 38–50, 2536.
8. C a m p b e l l J. H. NIF optical materials and fabrication technologies: An
overview // Proceedings of SPIE. – 2004. – Vol. 5341.
9. ГОСТ 2789–73. Шероховатость поверхности. Параметры и характеристики.
10. ISO 4287/1. Surface texture: profile method – terms, definitions and surface
texture parameters.
11. D e c k L. L., S o o b i t s k y J. A. Phase-shifting via wavelength tuning in
very large aperture interferometers // SPIE. – 1999. – Vol. 3782.
12. K i m b r o u g h B., M i l l e r d J., W y a n t J., H a y e s J. Low Coherence
Vibration Insensitive Fizeau Interferometer // Proc. of SPIE. – 2006. –
Vol. 6292.
13. K i m b r o u g h B., B r o c k N., M i l l e r d J. Dynamic surface roughness
profiler // Proc. of SPIE. – 2011. – Vol. 8126. 81260H-1.
14. Intellium™ H2000 Overview //
15. B r o c k J. E., H a y e s N. J., N o r t h - M o r r i s J. B. et al. Pixelated phase-
mask dynamic interferometer // Proc. SPIE. – 2004. – Vol. 5531. – P. 304–
315.
16. B r o c k N. J., K i m b r o u g h B. T., M i l l e r d J. E. A pixelated polarizer-
based camera for instantaneous interferometric measurements // Proc. of
SPIE. – 2011. – Vol. 8160.
17. K o t h i y a l P., D e l i s l e R. Shearing interferometer for phase shifting in-
terferometry with polarization phase shifter // Applied Optics/ – 1985. – Vol.
24. – No. 24. – P. 4439–4442.
18. F a r r e l l C. T., P l a y e r M. A. Phase step measurement and variable step
algorithms in phase-shifting interferometry // Meas. Sci. Technol. – 1992. –
No. 3. – P. 953–958.
Статья поступила в редакцию 26.09.2012