Оптимизация электроразрядного датчика низкого давления

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Оптимизация электроразрядного датчика низкого давления
Инженерный журнал: наука и инновации # 5·2016 13
Optimization of a low pressure sputter-ion sensor
© A.I. Zhakin, A.A. Gromov, A.A. Lutsenko, V.A. Pikkiev
South-Western State University (SWSU), Kursk, 305040, Russia
The article discusses theoretical and experimental studies of low-pressure sputter-ion
sensors in nitrogen-oxygen plasma. Sensor is an electrode system in the form of a cylin-
drical capacitor with crossed electric and magnetic fields. The magnetic field allows for
maintaining the sustainable development of the electric discharge. There suggested the
system of plasma chemical equations upon which expression for the dependence of the
current from the applied voltage and the sensor pressure was obtained. The agreement of
the results of theoretical and experimental studies is satisfactory. Based on these results
recommendations for optimizing the sensor are provided - the sensor size is decreased
and the accuracy of the pressure measurements is increased.
Keywords: sensor, pressure, discharge, electric field, magnetic field, plasma chemical
reactions, current, volt-ampere characteristic.
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