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M.V. Makarova, K.M. Moiseev
12
Engineering Journal: Science and Innovation # 1·2018
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Makarova M.V.,
second year Master' Degree student, Department
of Electron Beam
Technologies in Mechanical Engineering, Bauman Moscow State Technical University.
Research interests: technology of thin-film structure formation in vacuum, high rate dep-
osition of thick films of various materials in vacuum, vacuum technological equipment.
e-mail:
m.v.makarova@list.ruMoiseev K.M.,
Cand. Sc. (Eng.), Assoc. Professor, Department of Electron Beam Tech-
nologies in Mechanical Engineering, Bauman Moscow State Technical University. Re-
search interests: technology of thin-film structure formation in vacuum, reactive magne-
tron high-frequency sputtering, ion-beam processing, vacuum technological equipment,
functional coatings in innovative devices. e-mail:
mkm430@ya.ru