Е.В. Панфилова, А.А. Доброносова
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Инженерный журнал: наука и инновации
# 8·2017
technological conference]. Moscow, Bauman Moscow State Technical Universi-
ty, 11–13 September, 2014. Moscow, JSC TECHNOMASH Publ., 2014,
pp. 368–385.
Panfilova E.V.
, Cand. Sc. (Eng.), Assoc. Professor, Department of Electron Beam Tech-
nologies in Mechanical Engineering, Bauman Moscow State Technical University. Spe-
cialises in nanotechnology, colloidal nanostructures, thin films.
e-mail:
ev-panfilova@mail.ruDobronosova A.A.
, student, Bauman Moscow State Technical University. Specialises in
nanotechnology, thin films. e-mail:
dobronosova.bmstu@yandex.ru