Применение методов сканирующей зондовой микроскопии в исследовании опаловых наноструктур

Application of scanning probe microscopy in the research of opal nanostructures

Engineering Journal: Science and Innovation

# 1·2018 11

Panfilova E.V.

, Cand. Sc. (Eng.), Assoc. Professor, Department of Electron Beam Tech-

nologies in Mechanical Engineering, Bauman Moscow State Technical University. Re-

search interests: nanotechnologies, dispersed nanoparticles, thin films.

e-mail:

Syritsky A.B.

, Cand. Sc. (Eng.), Assoc. Professor, Department of Metrology and Inter-

changeability, Bauman Moscow State Technical University. Research interests: nano-

metrology, phase-chronometric measuring technologies. e-mail:

Dobronosova A.A.

, post-graduate student, Department of Electron Beam Technologies

in Mechanical Engineering, Bauman Moscow State Technical University. Research inter-

ests: nanotechnologies, thin films. e-mail: