Монтаж и запуск жидкофазного магнетрона НМСА-52 на установке МВТУ-11-1

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М.В. Макарова, М.А. Мартыненко, А.С. Бабурин, К.М. Моисеев
8
Installation and start of a liquid-phased magnetron
NMSA-52 on the installation BMSTU-11-1
© M.V. Makarova, M.A. Martynenko, A.S. Baburin, K.M. Moiseev
Bauman Moscow State Technical University, Moscow, 105005, Russia
The article considers a SolidWorks-model of magnetic system of liquid-phased magne-
tron NMSA-52, which was mounted and started on the installation BMSTU-11-1. We
compared two variants of the magnetic system. A number of experiments on launching of
the magnetron have been carried out with different variations of targets and different
conditions of discharge. The best operation modes were determined when you start up
with the crucible and the target for liquid-phase spraying for the new magnetic system.
Analysis of the obtained results proved the necessity of continuing the work on the reach-
ing a liquid-phase mode in the magnetron by using a unit of increased power.
Keywords: liquid-phased magnetron, modelling of magnetic field, magnetic system, ion
spraying.
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