С.А. Адарчин, В.Г. Косушкин, Е.Н. Адарчина
10
Reliability of automotive electronic components under con-
ditions of alternating loads
©
S.A. Adarchin
1
, V.G. Kosushkin
1
, E.N. Adarchina
2
1
Kaluga Branch of Bauman Moscow State Technical University, Kaluga, 248000, Russia
2
JSC «KNIITMU», Kaluga, 248000, Russia
Generalized Hooke's law for a silicon single-crystal sensitive element of pressure sensors
of automobile electronics showed that at a tension arising in sensitive elements of sensors
under conditions of real operation of car engines, there can be defects in crystal lattice
which cause a hysteresis of the device properties. It is established that experimental data
on frequency distribution of hysteresis size of the sensors electrophysical parameters can
be described by the normal law of distribution of random variables. We offer a mathe-
matical model of hysteresis emergence and change in sensor elastic elements of mikro-
elektromechanical structures used in automobile electronics. The model was constructed
using a method of polynomial regression of experimental data and allows to define relia-
bility of commercially available sensors. It is shown that in order to reduce the magni-
tude of the temperature hysteresis of the output signal in integrated pressure sensors, it is
necessary to eliminate the causes of elastic stresses in their structures.Optimization of
sensors technological process (changing technology of holes formation in the glass, upon
which the membrane is attached) allowed to reduce the hysteresis sensor output to 0.01
mV instead of 0.07 mV for base technology.
Keywords:
pressure sensors, automotive electronics, defects and hysteresis of parameters,
MEMS, integrated chip, reliability, dislocations.
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