The problems of thick tin layer formation by ion sputtering in magnetron systems in target vapors
Published: 17.01.2018
Authors: Makarova M.V., Moiseev K.M.
Published in issue: #1(73)/2018
DOI: 10.18698/2308-6033-2018-1-1717
Category: Metallurgy and Science of Materials | Chapter: Science of Materials in Mechanical Engineering