Engineering Journal: Science and InnovationELECTRONIC SCIENCE AND ENGINEERING PUBLICATION
Certificate of Registration Media number Эл #ФС77-53688 of 17 April 2013. ISSN 2308-6033. DOI 10.18698/2308-6033
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Authors
Makarova M.V.

Makarova M.V.

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Bauman Moscow State Technical University
Moscow, Russian Federation

Makarova M.V., second year Master’ Degree student, Department of Electron Beam Technologies in Mechanical Engineering, Bauman Moscow State Technical University. Research interests: technology of thin-film structure formation in vacuum, high rate deposition of thick films of various materials in vacuum, vacuum technological equipment.

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