In situ Laser interferometric holoellipsometry with normal and brewster reflections of light
Published: 19.10.2013
Authors: Ali Mohammed , Kachurin Yu.Yu., Kirjanov A.P.
Published in issue: #7(19)/2013
DOI: 10.18698/2308-6033-2013-7-836
Category: Instrumentation | Chapter: Optical engineering
This paper presents in situ holoellipsometry using a laser interferometric holoellipsometer with binary modulation of the polarization and of the both normal and Brewster reflection of polarized light from an optical uniaxial bi-dimensional crystal posted in the arm of Michelson interferometer, which is used as a technical basis for the device.