Installation and start of a liquid-phased magnetron NMSA-52 on the installation BMSTU-11-1
Authors: Makarova M.V., Martynenko M.A., Baburin A.S., Moiseev K.M.
Published in issue: #8(44)/2015
DOI: 10.18698/2308-6033-2015-8-1434
Category: Mechanical Engineering and Machine Science | Chapter: Manufacturing Engineering
The article considers a SolidWorks-model of magnetic system of liquid-phased magnetron NMSA-52, which was mounted and started on the installation BMSTU-11-1. We compared two variants of the magnetic system. A number of experiments on launching of the magnetron have been carried out with different variations of targets and different conditions of discharge. The best operation modes were determined when you start up with the crucible and the target for liquid-phase spraying for the new magnetic system. Analysis of the obtained results proved the necessity of continuing the work on the reaching a liquid-phase mode in the magnetron by using a unit of increased power.
References
[1] Guide to power unit. Available at: http://apelvac.com/f/37/92/Manual%20APEL-M-3PDC.pdf (accessed 14 June 2015).
[2] Voinov R.Yu., Tretyakov R.S., Talaeva Yu.S. Issledovaniye energopotrebleniya diodnykh raspylitel’nykh sistem s tverdym i zhidkim katodom [Study of power diode sputtering systems with solid and liquid cathode]. Tomsk, Tomsk Polytechnic University, 2009, pp. 3.
[3] Kuzmichev A.I. Magnetronnyye raspylitel’nyye sistemy [Magnetron sputtering systems]. Moscow, Avers Publ., 2008, 244 p.
[4] Makarova M.V., Baburin A.S. Montazh i zapusk zhidkofaznogo magnetrona NMSA-50 na ustanovke MVTU-11-1 [Installation and start of a liquid-phased magnetron NMSA-50 on the installation BMSTU-11-1]. [Electronic resource]. Vserossiyskaya nauchno-tekhnicheskaya konferentsiya "Studencheskaya nauchnaya vesna: Mashinostroitel’nyye tekhnologii". Materialy konferentsii, 7-10 aprelya, 2015, Moskva, MGTU im. N.E. Baumana [All-Russian Scientific Conference "Student Scientific spring: Engineering technologies". Materials of the conference, 7-10 April, 2015, Moscow, BMSTU]. Moscow, JSC "KvantorForm", 2015. Available at: http://studvesna.ru/?go=articles&id=1234 (accessed 14 June 2015).
[5] Makarova M.V., Baburin A.S. Izmerenie i modelirovanie magnitnoy sistemy zhidkofaznogo magnetrona NMSA-50 [Measuring and modeling of a magnetic system of the liquid-phased magnetron NMSA-50]. [Electronic resource]. Vserossiyskaya nauchno-tekhnicheskaya konferentsiya "Studencheskaya nauchnaya vesna: Mashinostroitel’nyye tekhnologii". Materialy konferentsii, 710 aprelya, 2015, Moskva, MGTU im. N.E. Baumana [All-Russian Scientific Conference "Student Scientific spring: Engineering technologies". Materials of the conference, 7-10 April, 2015. Moscow, BMSTU]. Moscow, JSC "KvantorForm", 2015. Available at: http://studvesna.ru/?go=articles&id=1237 (accessed 14 June 2015).