Prospects in combined turbomolecular vacuum pumps development
Published: 10.10.2013
Authors: Demikhov K.E., Nikulin N.K., Svichkar E.V.
Published in issue: #5(17)/2013
DOI: 10.18698/2308-6033-2013-5-754
Category: Engineering | Chapter: Vacuum and air compressors