Parameter investigation of the micro-optical and diffraction elements by the Shuttle and Find correlated microscopy technology
Published: 17.12.2012
Authors: Goncharov A.S., Kovalev M.S., Solomashenko A.B., Kuznecov A.S.
Published in issue: #9(9)/2012
DOI: 10.18698/2308-6033-2012-9-361
Category: Instrumentation | Chapter: Optical engineering