Spatial distribution of ITO-coating thickness measurement technique by AOTF spectrometer
Published: 11.11.2013
Authors: Perchik A.V., Tolstoguzov V.L., Stasenko K.V., Tsepulin V.G.
Published in issue: #9(21)/2013
DOI: 10.18698/2308-6033-2013-9-915
Category: Instrumentation | Chapter: Optical engineering
AOTF imaging spectrometer and spatial distribution of thin ITO-coating film thickness measurement technique are described.