Interferometer’s Optical System for Measuring and Monitoring a Shape of Convex Spherical Surface of Large Diameter
Published: 05.03.2013
Authors: Purjaev D.T., Lazareva N.L., Dudenkova E.A.
Published in issue: #1(13)/2013
DOI: 10.18698/2308-6033-2013-1-519
Category: Instrumentation | Chapter: Optical engineering
The paper offers a radically new optical circuit of laser interferometer for non-contact monitoring the shape of large convex spherical surfaces directly on the machine base plate. The operational wave front is formed by a lens comprising stationary spherical mirror 1200 mm in diameter and four removable compensators less than 200 mm in diameter. The lens wave aberration at autocollimating ray path does not exceed 0.07 He:Ne laser wavelength.