Engineering Journal: Science and InnovationELECTRONIC SCIENCE AND ENGINEERING PUBLICATION
Certificate of Registration Media number Эл #ФС77-53688 of 17 April 2013. ISSN 2308-6033. DOI 10.18698/2308-6033
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Authors
Panfilov Yu.V.

Panfilov Yu.V.

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Bauman Moscow State Technical University
Moscow, Russian Federation

Panfilov Yu.V. graduated from Bauman Moscow Higher Technical School in 1972. Dr. Sci. (Eng.), Professor, Head of the Electronic Technologies in Mechanical Engineering Department of Bauman Moscow State Technical University. Specializes in the field of vacuum manufacturing equipment, nanotechnologies.

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