Активные теплоотводы как новое направление в микроэлектронике
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Active heat sinks as a new concept in microelectronics
© Yu.N. Bendryshev, V.I. Strelov
SIC "Space Materials", Branch of the Crystallography Institute RAS,
Kaluga, 248640, Russia
We studied the problem of removing heat generated during the operation of electronic prod-
ucts. A number of carried out experiments proved the effectiveness of micro-pumps usage as a
cooling device for semiconductor devices, computers, lasers, LED systems, and so on. We
have identified some features of the micropumps use. The obtained results are very important
for the development of integrated systems (including MEMS technology).
Keywords:
active heat sink, micropump, piezodrive, membrane piezodrive.
REFERENCES
Kiseev V., Aminev D., Cherkashin V., Murzin R. Dvukhfaznye teplop-
eredayuschie sistemy dlya okhlazhdeniya svetodiodnykh svetilnikov [Two-
phase heat transfer system for cooling the LED lamps]. Poluprovodnikovaya
svetotekhnika — Solid-State Lighting, 2011, no. 3, pp. 27–31.
Bendryshev Yu.N.
(b. 1954) graduated from Kaluga branch of Bauman Moscow Higher
Technical School in 1978. Leading Specialist of the SIC "Space Materials", Branch of
Crystallography Institute named after A.V. Shubnikov RAS. Research interests include
thermoelectric generator, microelectronics, acoustic electronics. e-mail:
Strelov V.I.
(b. 1952) graduated from Moscow Institute of Electronic Technology.
Dr. Sci. (Phys.&Math.), Director of the SIC "Space Materials", Branch of Crystallog-
raphy Institute RAS. Author of over 150 scientific papers in the fields of crystal growth
and solid state physics. e-mail
