The fabrication method of diffractive optical elements by plasma-chemical etching to form etalon dot-images
Authors: Odinokov S.B., Sagatelyan G.R., Solomashenko A.B., Drozdova E.A.
Published in issue: #9(21)/2013
DOI: 10.18698/2308-6033-2013-9-922
Category: Instrumentation | Chapter: Optical engineering