Evacuation Data Calculation for a Molecular-Viscous Vacuum Pump
Published: 03.12.2012
Authors: Demikhov K.E., Nikulin N.K., Dronov A.V.
Published in issue: #7(7)/2012
DOI: 10.18698/2308-6033-2012-7-273
Category: Engineering | Chapter: Vacuum and air compressors