Engineering Journal: Science and InnovationELECTRONIC SCIENCE AND ENGINEERING PUBLICATION
Certificate of Registration Media number Эл #ФС77-53688 of 17 April 2013. ISSN 2308-6033. DOI 10.18698/2308-6033
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Article

Analytical Methods of Statics of Flexible Suspensions of Micromechanical Devices

Published: 02.04.2013

Authors: Podchezertsev V.P.

Published in issue: #2(14)/2013

DOI: 10.18698/2308-6033-2013-2-557

Category: Instrumentation

In the given work some results of development of analytical model elastic suspension the MEMS device allowing are presented to spend its numerical calculations for any quantity of initial data determining its configuration and practically instantly to receive results of these calculations.