Analytical Methods of Statics of Flexible Suspensions of Micromechanical Devices
Published: 02.04.2013
Authors: Podchezertsev V.P.
Published in issue: #2(14)/2013
DOI: 10.18698/2308-6033-2013-2-557
Category: Instrumentation
In the given work some results of development of analytical model elastic suspension the MEMS device allowing are presented to spend its numerical calculations for any quantity of initial data determining its configuration and practically instantly to receive results of these calculations.